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Title: The effect of fluorine in low thermal budget polysilicon emitters for SiGe heterojunction bipolar transistors.
Author: Schiz, Frank Jochen Wilhelm.
ISNI:       0000 0001 3555 102X
Awarding Body: University of Southampton
Current Institution: University of Southampton
Date of Award: 1999
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: FLUORINE; SILICON; HETEROJUNCTIONS; TRANSISTORS; AMORPHOUS STATE; GERMANIUM Solid state physics Electric circuits Electronic circuits