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Title: E-beam lithography and dry processing for submicron fabrication.
Author: Khaleque, Ferdouse.
ISNI:       0000 0001 3598 0342
Awarding Body: Imperial College London (University of London)
Current Institution: Imperial College London
Date of Award: 1990
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Semiconductors; IC manufacture Electric apparatus and appliances Electronic apparatus and appliances