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Title: Silicon implant profile control by co-implantation.
Author: Gwilliam, Russell.
ISNI:       0000 0001 2439 4540
Awarding Body: University of Surrey
Current Institution: University of Surrey
Date of Award: 1991
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Semiconductors. Field effect transistors Solid state physics