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Title: The development of reproducible low dose selenium implantation into SI GaAs for integrated circuit development
Author: Leigh, P. A.
Awarding Body: University of Surrey
Current Institution: University of Surrey
Date of Award: 1982
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Circuits