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Title: The design, manufacture and testing of a low-cost cleanroom robot for handling silicon wafers.
Author: Lopez Parra, Marcelo.
Awarding Body: Cranfield University
Current Institution: Cranfield University
Date of Award: 1994
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Semiconductor fabrication Robotics Manufacturing processes