Use this URL to cite or link to this record in EThOS: http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.260098
Title: The design, manufacture and testing of a low-cost cleanroom robot for handling silicon wafers.
Author: Lopez Parra, Marcelo.
Awarding Body: Cranfield University
Current Institution: Cranfield University
Date of Award: 1994
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Abstract:
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.260098  DOI: Not available
Keywords: Semiconductor fabrication Robotics Manufacturing processes
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