Use this URL to cite or link to this record in EThOS: http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.244327
Title: Lithographic characterisation of a selection of polymeric resists for microlithographic applications.
Author: Murphy, Julian James.
Awarding Body: University of Kent at Canterbury
Current Institution: University of Kent
Date of Award: 1997
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Abstract:
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.244327  DOI: Not available
Keywords: Reprographics Photography Photography Photocopying Chemistry, Physical and theoretical
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