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Title: Argon and argon-chlorine plasma reactive ion etching and surface modification of transparent conductive tin oxide thin films for high resolution flat panel display electrode matrices.
Author: Molloy, James.
Awarding Body: University of Ulster
Current Institution: Ulster University
Date of Award: 1997
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Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Metal oxides; Ion energy analysis Plasma (Ionized gases) Ceramics Ceramics Optoelectronics