Use this URL to cite or link to this record in EThOS: http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.241194
Title: Design and study of an electron beam system for silicon recrystallization.
Author: Zissis, Nikolaos.
ISNI:       0000 0001 3577 9980
Awarding Body: University of Cambridge
Current Institution: University of Cambridge
Date of Award: 1992
Availability of Full Text:
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Abstract:
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.241194  DOI: Not available
Keywords: Silicon-On-Insulator devices; SOI
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