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Title: Dry etching of silicon based semiconductor materials : plasma diagnostics and reaction mechanics.
Author: Dartnell, Nicholas John.
ISNI:       0000 0001 3404 7796
Awarding Body: University of Southampton
Current Institution: University of Southampton
Date of Award: 1993
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Physical chemistry